Location History:
- Bunkyo-ku, JP (1998)
- Tokyo, JP (1987 - 2014)
Company Filing History:
Years Active: 1987-2014
Title: Masaomi Kameyama: Innovator in Immersion Lithography
Introduction
Masaomi Kameyama is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of immersion lithography, holding a total of 17 patents. His work has been instrumental in advancing technology in device fabrication methods.
Latest Patents
Kameyama's latest patents focus on an immersion lithography system. This system includes a wafer stage, a lens for projecting an image onto a wafer located on the wafer stage, an immersion fluid supply for supplying immersion fluid between the lens and the wafer, and a purge fluid conveying device for conveying about the supplied immersion fluid a purge fluid saturated with a component of the immersion fluid. This innovative approach enhances the precision and efficiency of the lithography process.
Career Highlights
Throughout his career, Kameyama has worked with notable companies such as Nikon Corporation and Nippon Kogaku K.K. His experience in these leading organizations has allowed him to refine his skills and contribute to groundbreaking advancements in the field.
Collaborations
Kameyama has collaborated with esteemed colleagues, including Kazuo Ushida and Shigeru Hirukawa. These partnerships have fostered a creative environment that has led to significant technological advancements.
Conclusion
Masaomi Kameyama's contributions to immersion lithography and his impressive portfolio of patents underscore his status as a leading inventor in the field. His work continues to influence the future of device fabrication methods.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.