Masanori Ono is a prominent inventor based in Chiba, Japan. He has made significant contributions to the field of substrate support technology, holding a total of 12 patents. His work focuses on enhancing the efficiency and effectiveness of substrate support assemblies used in various applications.

Latest Patents

One of Masanori Ono's latest patents is the Temperature Controlled Substrate Support Assembly. This innovative assembly enables both lateral and azimuthal tuning of heat transfer between an electrostatic chuck and a heater assembly. The design includes an upper surface and a lower surface, with one or more main resistive heaters integrated into the substrate support. Additionally, a plurality of heaters is arranged in a column with the main resistive heaters, allowing for independent control of each heater relative to one another and the main resistive heater.

Career Highlights

Masanori Ono is currently employed at Applied Materials, Inc., where he continues to develop cutting-edge technologies in substrate support systems. His expertise and innovative mindset have positioned him as a key player in his field.

Collaborations

Throughout his career, Masanori has collaborated with notable colleagues, including Vijay D Parkhe and Konstantin Makhratchev. These partnerships have further enriched his work and contributed to advancements in substrate technology.

Conclusion

Masanori Ono's contributions to substrate support technology exemplify his dedication to innovation and excellence. His patents and collaborations reflect a commitment to advancing the field, making him a noteworthy inventor in the industry.

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