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Masanori Ono

USPTO Granted Patents = 12

Average Co-Inventor Count = 2.6

ph-index = 4

Forward Citations = 123(Granted Patents)

Location History:

Chiba-Prefecture, JP (2000)
Narita, JP (2003)
Chiba, JP (2001 - 2021)

Company Filing History:

12 out of 13,684

Applied Materials, Inc.

Years Active: 2000-2025

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12 patents (USPTO):Sort by Forward Citations

Abstract keywords

1. 12243756 - Temperature controlled substrate support assembly (2025-03-04),

2. 11158526 - Temperature controlled substrate support assembly (2021-10-26),

3. 10460916 - Real time monitoring with closed loop chucking force control (2019-10-29),

4. 10403534 - Pixilated cooling, temperature controlled substrate support assembly (2019-09-03),

5. 10121688 - Electrostatic chuck with external flow adjustments for improved temperature distribution (2018-11-06),

6. 9875923 - Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods (2018-01-23),

7. 9622375 - Electrostatic chuck with external flow adjustments for improved temperature distribution (2017-04-11),

8. 9558981 - Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods (2017-01-31),

9. 9520315 - Electrostatic chuck with internal flow adjustments for improved temperature distribution (2016-12-13),

10. 6506290 - Sputtering apparatus with magnetron device (2003-01-14),

11. 6259592 - Apparatus for retaining a workpiece upon a workpiece support and method of manufacturing same (2001-07-10),

12. 6095754 - Turbo-Molecular pump with metal matrix composite rotor and stator (2000-08-01),

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