Masanori Akatsuka

Title: Masanori Akatsuka: Innovator in Silicon Wafer Manufacturing

Introduction

Masanori Akatsuka is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor technology, particularly in the manufacturing of silicon wafers. With a total of 2 patents, his work has advanced the efficiency and quality of silicon wafer production.

Latest Patents

One of Akatsuka's latest patents is a method for manufacturing silicon wafers. This innovative technique results in a silicon wafer with a large diameter, which exhibits no slip in a wide range of oxygen precipitate densities, even after undergoing heat treatments such as SLA or FLA. The method involves inputting various combinations of oxygen concentrations and thermal histories to solve a Fokker-Planck equation. This calculation determines the diagonal length and density of oxygen precipitates in the wafer after heat treatment. Additionally, the maximum heat stress acting on the wafer during the heat treatment process is calculated, leading to the determination of an optimal oxygen concentration.

Another notable patent is related to an SOI substrate and its manufacturing method. This substrate features a partial SOI structure, where a buried insulating film is formed via an active layer in a section of a silicon single crystal substrate. The design ensures that the thickness of the buried insulating film tapers towards its terminal edge, enhancing its performance.

Career Highlights

Throughout his career, Masanori Akatsuka has worked with reputable companies in the semiconductor industry. He has been associated with Sumco Corporation and Sumitomo Mitsubishi Silicon Corporation, where he has contributed to various innovative projects. His expertise in silicon wafer technology has made him a valuable asset in these organizations.

Collaborations

Masanori Akatsuka has collaborated with notable colleagues in his field, including Shinsuke Sadamitsu and Wataru Sugimura. Their combined efforts have furthered advancements in semiconductor manufacturing processes.

Conclusion

Masanori Akatsuka's contributions to silicon wafer manufacturing have established him as a key figure in the semiconductor industry. His innovative patents and collaborations reflect his commitment to advancing technology in this critical field.