Company Filing History:
Years Active: 2016-2018
Title: Masanobu Ezaki: Innovating Titania-Doped Quartz Glass for EUV Lithography
Introduction
Masanobu Ezaki, an innovative inventor based in Koriyama, Japan, has made significant contributions to the field of materials science. With a portfolio of 4 patents, his most recent work focuses on advancements in titania-doped quartz glass, emphasizing its application in extreme ultraviolet (EUV) lithography.
Latest Patents
Ezaki's latest patents detail groundbreaking methods in the fabrication and selection of titania-doped quartz glass. One significant patent describes an EUV light-reflecting surface that enhances the angle between the birefringent measurement point and the fast axis. This innovation allows for a higher average angle than 45 degrees, leading to a substrate with superior flatness optimal for EUV lithography. Furthermore, another patent outlines a method for selecting titania-doped quartz glass, targeting a reduction in OH group concentration to 100 ppm or less upon heat treatment at 900°C for 100 hours. This meticulous selection process ensures that the material meets the rigorous standards required for EUV lithography members.
Career Highlights
Masanobu Ezaki is currently associated with Shin-Etsu Chemical Co., Ltd., a leading organization in the materials sector. His work at the company reflects a commitment to innovation and quality in semiconductor manufacturing materials, particularly in areas crucial to advancing lithography techniques.
Collaborations
Throughout his career, Ezaki has collaborated with esteemed colleagues such as Shigeru Maida and Hisatoshi Otsuka. These partnerships have enabled the fusion of expertise and ideas, resulting in advanced materials and processes that are vital for the future of EUV lithography technology.
Conclusion
Masanobu Ezaki's innovative work with titania-doped quartz glass significantly impacts the realm of EUV lithography. His patents reflect a deep understanding of material properties and an unwavering dedication to enhancing semiconductor manufacturing processes. With ongoing collaborations and his position at Shin-Etsu Chemical Co., Ltd., Ezaki is poised to continue shaping the future of materials science and lithography technology.
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