Kokubunji, Japan

Masamoto Akeyama


Average Co-Inventor Count = 3.8

ph-index = 3

Forward Citations = 1,452(Granted Patents)


Company Filing History:


Years Active: 1980-1984

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3 patents (USPTO):Explore Patents

Title: The Innovative Mind of Masamoto Akeyama: A Pioneer in Pattern Forming Technologies

Introduction: Masamoto Akeyama is a renowned inventor based in Kokubunji, Japan, known for his significant contributions to the field of pattern forming technologies. With a total of three patents to his name, Akeyama's work has advanced the capabilities of optical lithography, especially in the semiconductor industry.

Latest Patents: Among his notable inventions, Akeyama's recent patents include a sophisticated pattern forming apparatus. This apparatus projects a pattern from a reticle onto a photoresist layer on a substrate using an advanced illumination system and reduction lenses. The liquid sustaining means incorporated in his design enhances the optical quality by filling the gap between the reduction lenses and the photoresist layer with an optically transparent liquid.

Another significant patent is a method involving the disposal of a substrate coated with a photosensitive composition in a first liquid. This innovative approach, along with a mask featuring a predetermined pattern, allows for high-resolution imaging while avoiding the influence of dust.

Career Highlights: Masamoto Akeyama's career is further illuminated by his association with Hitachi, Ltd., a leading company in technology and innovation. His work in the company has positioned him as an influential figure in the development of advanced manufacturing processes, particularly in the production of semiconductor devices.

Collaborations: Throughout his career, Akeyama has collaborated with fellow innovators, including Akihiro Takanashi and Tatsuo Harada. These partnerships have fostered a collaborative environment that encourages the exchange of ideas, leading to groundbreaking advancements in their respective fields.

Conclusion: Masamoto Akeyama's contributions to innovation and invention are testament to his expertise and creativity. His patents not only showcase his technical prowess but also reflect his commitment to advancing technology. As the industry continues to evolve, Akeyama's work will undoubtedly leave a lasting impact on the future of pattern forming and optical technologies.

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