Hitachi, Ltd.

Masamoto Akeyama

Sumio Hosaka

Yoshio Kawamura

Yoshifumi Tomita

Saburo Nonogaki

Toshiei Kurosaki

Shinji Kuniyoshi

Tatsuo Harada

Kuninori Imai

Akihiro Takanashi

Soji Takahashi

Yataro Kondo

There is disclosed a pattern forming apparatus for projecting a pattern which is formed on a reticle upon a photoresist layer on a substrate which comprises an illumination system for illuminating the pattern for forming an optical image, a reduction lenses for reducing the optical pattern image at a certain reduction ratio and projecting the reduced optical pattern image upon the photoresist layer formed on the substrate for exposing the photoresist layer, and liquid sustaining means for filling a gap between at least a portion of the reduction lenses and the photoresist layer with an optically transparent liquid having a refractive index of more than 1 (one).

Pattern forming apparatus

A pattern forming method comprising a step of disposing a substrate with a coated film of photosensitive composition and a mask having a predetermined pattern in a first liquid which does not dissolve said coated film of photosensitive composition, and a step of exposing said coated film to light through said mask. An apparatus for attaining this method is also disclosed. The influence of dust can be readily avoided and an image with high resolution is obtained.

Pattern forming method and pattern forming apparatus using exposures in

This invention relates to a method of manufacturing an article having a press-worked member inwardly of a cylindrical member, which comprises a first step for removing stain and oxidation film on the inner surface of a cylindrical member and on the peripheral side surface of a blank, a second step for arranging the blank inwardly of the cylindrical member so that the purified side surface of the blank may be faced toward the purified internal surface of the cylindrical member, a third step for subjecting the blank to a cold press-working inside the cylindrical member to thereby closely combine the blank with the cylindrical member, a fourth step for further subjecting the cold-worked blank to a hot press-working inside the cylindrical member to thereby form the blank into a desired shape within the cylindrical member, and a fifth step for annealing the combined members at a temperature for diffusion to thereby join the blank with the cylindrical member by diffusion. After that, a machining step such as cutting, milling or so on, is followed to provide a finished product of a desired shape. Also, such a machining step can be carried out between the fourth step and the fifth step.

Method of manufacturing an article having a press-worked member inwardly

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Kokubunji, Japan

Masamoto Akeyama