Company Filing History:
2 out of 21,351 
1 out of 90,934 
Years Active: 1996-2000
Title: Masami Matsumoto: Innovator in Semiconductor Technology
Introduction
Masami Matsumoto is a notable inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on improving the manufacturing processes of semiconductor devices, which are crucial for modern electronics.
Latest Patents
Matsumoto's latest patents include a method of manufacturing a semiconductor device having a single crystal. This invention aims to eliminate the need for stacking a contact hole and a lower electrode, thereby preventing errors in stacking and allowing for precise capacitor formation. The process involves depositing amorphous silicon on an interlayer insulating film, applying a resist, and using photolithography to shape the resist. The implantation of phosphorus ions is then performed, followed by heat treatment to partially single crystallize the amorphous silicon, resulting in the growth of single crystal silicon. The selective removal of amorphous silicon is achieved through dry etching, forming a storage node.
Another significant patent is related to semiconductor memory and its manufacturing method. In this invention, a tubular storage node is formed, and slanting rotation implantation of impurity phosphorus ions is executed. The etching rate during thermal phosphoric acid treatment is controlled to roughen the surface without affecting the center of the storage node, thus maintaining its strength and increasing capacitance.
Career Highlights
Throughout his career, Matsumoto has worked with prominent companies such as Mitsubishi Electric Corporation and Canon Inc. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking advancements in semiconductor technology.
Collaborations
Matsumoto has collaborated with notable colleagues, including Junichi Tsuchimoto and Kiyoshi Mori. These partnerships have fostered innovation and have been instrumental in the development of his patented technologies.
Conclusion
Masami Matsumoto's contributions to semiconductor technology through his innovative patents have significantly impacted the industry. His work continues to influence the development of advanced electronic devices, showcasing the importance of innovation in technology.