Location History:
- Kawasaki, JP (1989)
- Urayasu, JP (2001)
Company Filing History:
Years Active: 1989-2001
Title: The Innovations of Masahiko Yomoto
Introduction
Masahiko Yomoto is a prominent inventor based in Kawasaki, Japan. With a total of three patents, he has made significant contributions to the field of substrate measurement and temperature control in semiconductor manufacturing.
Latest Patents
Yomoto's recent innovations include the following patents:
1. **Flatness Measuring Apparatus**: This apparatus is designed to measure the flatness of a substrate on which specific patterns are formed. It works by adjusting focus to a reference flat plane, which is determined using height data from specific measuring points on the substrate. The system includes an arithmetic operation device that processes height data, establishes a flatness judging criterion, calculates displacement quantities at predetermined measuring points, and ultimately measures the substrate's flatness based on these displacements.
2. **Method for Measuring Temperature of Semiconductor Substrate**: This patent details a method and apparatus for detecting substrate temperature and controlling radiation-annealing processes. By measuring infrared light intensity from the substrate both during and after irradiation, it calculates temperature based on the substrate's transmissivity and emissivity derived from these measurements.
Career Highlights
Masahiko Yomoto serves as an inventor at Nikon Corporation, a leading company known for its advanced imaging and optical products. His work primarily focuses on enhancing semiconductor manufacturing processes, showcasing his expertise in the precise measurement of material properties.
Collaborations
Throughout his career, Yomoto has collaborated with notable colleagues, including Makoto Uehara and Hajime Ichikawa. Their collective efforts in research and development have contributed significantly to the innovations in measurement technologies.
Conclusion
Masahiko Yomoto's contributions to the field of semiconductor technology through his patents underline the importance of innovation in modern manufacturing processes. His work not only improves measurement accuracy but also enhances overall efficiency in the industry, establishing him as a noteworthy inventor in the technological landscape.