The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 27, 2001
Filed:
Dec. 01, 1999
Masahiko Yomoto, Urayasu, JP;
Hosei Nakahira, Bunkyo-ku, JP;
Eiji Matsukawa, Yotsukaido, JP;
Hironobu Sakuta, Chiba, JP;
Nikon Corporation, Tokyo, JP;
Abstract
A flatness measuring apparatus measures flatness of a substrate on which a specific pattern is to be formed by adjusting focus to a forming reference flat plane obtained based upon height data corresponding to specific measuring points of the substrate. The flatness measuring apparatus includes: an arithmetic operation device that obtains height data at predetermined measuring points of the substrate, determines a flatness judging criterion flat plane based upon height data at measuring points located at positions at which the specific measuring points are located through an arithmetic operation, determines quantities of displacement at the predetermined measuring points relative to the flatness judging criterion flat plane through an arithmetic operation, and measures the flatness of the substrate based upon the quantities of displacement.