Osaka, Japan

Masahiko Okui


Average Co-Inventor Count = 5.3

ph-index = 3

Forward Citations = 36(Granted Patents)


Location History:

  • Sanda, JP (1995 - 2002)
  • Osaka, JP (2003 - 2004)
  • Tokyo, JP (2010)

Company Filing History:


Years Active: 1995-2010

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6 patents (USPTO):Explore Patents

Title: Masahiko Okui: Innovator in Silicon Technology

Introduction

Masahiko Okui is a prominent inventor based in Osaka, Japan. He has made significant contributions to the field of silicon technology, particularly in the production of high-quality silicon single crystals. With a total of 6 patents to his name, Okui's work has had a substantial impact on semiconductor materials.

Latest Patents

One of Okui's latest patents is a silicon single crystal wafer designed for particle monitors. This wafer features an extremely low surface density of light point defects, maintaining its quality even after repeated SC-1 cleaning processes. The wafer is produced by slicing a silicon single crystal ingot that includes areas where crystal-originated particles are generated. The resulting surface density of particles, measuring at least 0.12 micrometers, is kept to a maximum of 15 counts/cm after the SC-1 process. Furthermore, a silicon single crystal wafer with a nitrogen concentration of 1×10^10 atoms/cm can achieve a surface density of no more than 1 count/cm for particles of the same size, ensuring high quality for particle monitoring applications.

Another notable patent involves a production device for high-quality silicon single crystals. This apparatus is designed to produce large-diameter, long-length, and high-quality single crystals suitable for semiconductor wafers. The device includes a cooling member that surrounds the single crystal being pulled up, with specific dimensions to optimize the production process. The design allows for stable production while minimizing the number of grown-in defects, which is crucial for the quality of the resulting wafers.

Career Highlights

Throughout his career, Masahiko Okui has worked with several notable companies, including Sumitomo Metal Industries, Inc. and Sumitomo Mitsubishi Silicon Corporation. His experience in these organizations has contributed to his expertise in silicon technology and innovation.

Collaborations

Okui has collaborated with several professionals in his field, including Takayuki Kubo and Manabu Nishimoto. These collaborations have further enhanced his research and development efforts in silicon technology.

Conclusion

Masahiko Okui's contributions to the field of silicon technology are noteworthy, with his innovative patents paving the way for advancements in semiconductor materials. His work continues to influence the industry, ensuring the production of high-quality silicon wafers for various applications.

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