Location History:
- Mountain View, CA (US) (2012 - 2014)
- Fremont, CA (US) (2017)
Company Filing History:
Years Active: 2012-2017
Title: Innovations by Maryam Moravej
Introduction
Maryam Moravej is a prominent inventor based in Mountain View, California. She has made significant contributions to the field of plasma processing technology, holding three patents that showcase her innovative approach to solving complex engineering challenges.
Latest Patents
One of her latest patents is titled "Method and apparatus for DC voltage control on RF-powered electrode." This invention provides a method for processing a substrate in a plasma processing chamber, which includes supporting the substrate with an upper and lower electrode. The method involves configuring a radio frequency power source to ignite plasma and utilizing a conductive coupling ring to establish a conductive path. Additionally, it incorporates a plasma-facing-substrate-periphery ring to control plasma processing parameters effectively.
Another notable patent is "Strip with reduced low-K dielectric damage." This method focuses on forming etched features in a low-k dielectric layer beneath a photoresist mask. The process includes a fluorocarbon stripping phase and a reduced fluorocarbon stripping phase, ensuring minimal damage to the low-k dielectric layer during the etching process.
Career Highlights
Maryam Moravej is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. Her work at Lam Research has allowed her to develop cutting-edge technologies that enhance the efficiency and effectiveness of plasma processing.
Collaborations
Throughout her career, Maryam has collaborated with notable colleagues, including Eric A. Hudson and Bing Ji. These collaborations have contributed to her success and the advancement of innovative solutions in her field.
Conclusion
Maryam Moravej's contributions to plasma processing technology through her patents and work at Lam Research Corporation highlight her role as a leading inventor in the industry. Her innovative methods continue to influence the development of advanced semiconductor technologies.