Sunnyvale, CA, United States of America

Martin J McGrath


Average Co-Inventor Count = 3.2

ph-index = 4

Forward Citations = 138(Granted Patents)


Company Filing History:


Years Active: 1996-1999

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4 patents (USPTO):Explore Patents

Title: Martin J McGrath: Innovator in Substrate Processing Technology

Introduction

Martin J McGrath is a notable inventor based in Sunnyvale, CA (US). He holds a total of 4 patents that showcase his contributions to the field of substrate processing technology. His innovative designs and systems have significantly impacted the semiconductor industry.

Latest Patents

One of McGrath's latest patents is a scrubber control system. This control system includes an apparatus with a motor, a host processor for generating messages containing motor control information, and a control board that transmits commands to the motor. The communications medium supports both a first and a second communications path, facilitating efficient message transmission between the host processor and the control board.

Another significant patent is the method and apparatus for detecting a substrate in a substrate processing system. This improved system is designed for double-sided scrubbing of semiconductor substrates. It features wet stations with covers to prevent liquid from dripping outside and minimize contamination. The system includes transport tunnels to prevent leakage and a substrate transport mechanism that ensures stable transfer. Additionally, the processing system has two brush stations within a single enclosure, enhancing its efficiency and reliability.

Career Highlights

Throughout his career, Martin J McGrath has worked with prominent companies such as Ontrak Systems, Inc. and Applied Materials, Inc. His experience in these organizations has allowed him to develop and refine his innovative technologies.

Collaborations

McGrath has collaborated with notable professionals in the field, including David L Thrasher and Mark A Simmons. These collaborations have contributed to the advancement of substrate processing technologies.

Conclusion

Martin J McGrath's contributions to substrate processing technology through his patents and career achievements highlight his role as an influential inventor in the semiconductor industry. His innovative systems continue to pave the way for advancements in this critical field.

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