The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 09, 1996
Filed:
Apr. 21, 1994
Applicant:
Inventors:
Simon Shmookler, San Francisco, CA (US);
Andrew G Weinberg, San Jose, CA (US);
Martin J McGrath, Sunnyvale, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G05B / ;
U.S. Cl.
CPC ...
31856816 ;
Abstract
An improved position control means for robotic handling systems; particularly, a system and method for determining the centerpoint of a moving object, such as a semiconductor wafer, and calibration of the object support, using an array of sensors positioned generally transverse to the arcuate path of movement of the object and its support to detect the relative positions of the object and the support to a selected destination point for the purpose of precisely positioning the object relative to the selected destination point.