Location History:
- Torrance, CA (US) (2004 - 2005)
- Lomita, CA (US) (2005)
Company Filing History:
Years Active: 2004-2005
Title: Mark E Michaelian: Innovator in EUV Light Source Technology
Introduction
Mark E Michaelian is a notable inventor based in Lomita, California. He has made significant contributions to the field of extreme ultraviolet (EUV) light sources, holding a total of 4 patents. His innovative work focuses on enhancing the efficiency and effectiveness of EUV radiation sources, which are crucial for various applications, including semiconductor manufacturing.
Latest Patents
One of Michaelian's latest patents is for a "Laser-produced plasma EUV light source with pre-pulse enhancement." This invention employs a low energy laser pre-pulse and a high energy laser main pulse to generate EUV radiation. The pre-pulse creates a weak plasma in the target area, improving the absorption of the main laser pulse and enhancing EUV radiation emissions. The timing between the pre-pulse and the main pulse can be adjusted to optimize output intensity.
Another significant patent is the "Laser-produced plasma EUV light source with isolated plasma." This design features a nozzle positioned at a sufficient distance from the target region to prevent significant absorption of EUV radiation by target vapor. This innovation ensures that the nozzle remains unaffected by the EUV radiation, thereby maintaining the integrity of the source optics.
Career Highlights
Mark E Michaelian is affiliated with the University of Central Florida Research Foundation, Inc. His work has been instrumental in advancing the technology behind EUV light sources, which are essential for high-precision applications in modern industries.
Collaborations
Michaelian has collaborated with notable colleagues, including Henry Shields and Steven W Fornaca. Their combined expertise has contributed to the development of cutting-edge technologies in the field of EUV radiation.
Conclusion
Mark E Michaelian's innovative contributions to EUV light source technology highlight his role as a leading inventor in this specialized field. His patents reflect a commitment to enhancing the efficiency and effectiveness of EUV radiation sources, paving the way for advancements in various technological applications.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.