Company Filing History:
Years Active: 2004-2006
Title: Mark D Menzie: Innovator in Substrate Processing Technology
Introduction
Mark D Menzie is a notable inventor based in Sunnyvale, CA. He has made significant contributions to the field of substrate processing technology, holding a total of 4 patents. His work focuses on enhancing the performance and efficiency of components used in substrate processing chambers.
Latest Patents
Menzie’s latest patents include innovative designs and methods for evaluating and manufacturing chamber components. One of his patents, titled "Evaluation of chamber components having textured coatings," describes a component for a substrate processing chamber that features a textured coating with surface grains. This component is evaluated by directing a beam of electrons onto the textured coating, allowing for the detection of backscattered electrons to generate a signal image. The component is selected based on the size of the surface grains, which range from about 0.1 to about 5 microns, and may also be selected for having substantially flower-shaped grains.
Another significant patent is "Chamber having components with textured surfaces and method of manufacture." This invention involves a component composed of aluminum oxide with a roughened surface. The roughness average of the surface is between 150 to 450 microinches, and a plasma sprayed ceramic coating of aluminum oxide is deposited on it. This component can serve as a dome-shaped ceiling for the chamber, enhancing its functionality.
Career Highlights
Mark D Menzie is currently employed at Applied Materials, Inc., a leading company in the semiconductor and display industries. His work at Applied Materials has allowed him to push the boundaries of substrate processing technology, contributing to advancements that benefit the industry.
Collaborations
Menzie has collaborated with notable coworkers such as Shyh-Nung Steve Lin and Joe F Sommers. These collaborations have fostered innovation and development in the technologies related to substrate processing.
Conclusion
Mark D Menzie is a distinguished inventor whose work in substrate processing technology has led to several impactful patents. His contributions continue to shape the industry and enhance the performance of processing chambers.