The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 11, 2006
Filed:
Mar. 27, 2002
Shyh-nung Lin, Los Gatos, CA (US);
Mark D. Menzie, Sunnyvale, CA (US);
Nimoal Sun, San Jose, CA (US);
Shyh-Nung Lin, Los Gatos, CA (US);
Mark D. Menzie, Sunnyvale, CA (US);
Nimoal Sun, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A component for a substrate processing chamber comprises a structure having a textured coating with surface grains. The component is evaluated by directing a beam of electrons onto the textured coating of the component to cause at least some of the electrons to be backscattered. The backscattered electrons are detected and a signal image is generated. The component is selected when the signal image exhibits surface grains sized from about 0.1 to about 5 micron. In one version, the component is also selected when the grains are substantially flower shaped.