Mark C Phelps

Title: Mark C Phelps: Innovator in Semiconductor Contamination Detection

Introduction

Mark C Phelps is a notable inventor based in Attleboro, MA (US). He has made significant contributions to the field of semiconductor processing, particularly in the detection of contaminants. With a total of 2 patents, his work has advanced the methods used to ensure the purity of semiconductor environments.

Latest Patents

Mark C Phelps holds two recent patents that focus on systems and methods for detecting contaminants. The first patent, titled "Systems and methods for detecting contaminants," describes a system for sampling gas flow to measure contaminants within a semiconductor processing tool. This portable unit includes dry traps, Tenax traps, and optional wet impingers, which are coupled to a gas flow in a clean room. The unit measures contaminants during a determined sampling interval before being sent to an analysis facility for processing.

The second patent, "System and method for determining and controlling contamination," outlines a method for monitoring filter performance in an airstream of a semiconductor processing system. This method involves sampling the airstream upstream of the filter to detect molecular contaminants, identifying target species, and measuring non-polluting species at various locations. The method generates a numerical representation of a chromatogram of the sampled airstream, providing valuable insights into filter performance.

Career Highlights

Throughout his career, Mark has worked with prominent companies in the semiconductor industry, including Entegris, Inc. and Extraction Systems, Inc. His experience in these organizations has contributed to his expertise in contamination detection and control.

Collaborations

Mark has collaborated with notable professionals in his field, including William M Goodwin and Anatoly Grayfer. These collaborations have further enriched his work and innovations in semiconductor processing.

Conclusion

Mark C Phelps is a distinguished inventor whose work in semiconductor contamination detection has made a significant impact on the industry. His innovative patents and career achievements reflect his dedication to advancing technology in this critical field.