Company Filing History:
Years Active: 2007-2014
Title: The Innovative Contributions of Mark Borowicz
Introduction
Mark Borowicz is a notable inventor based in San Jose, California. He has made significant contributions to the field of substrate analysis and electron beam imaging. With a total of four patents to his name, Borowicz continues to push the boundaries of technology and innovation.
Latest Patents
Borowicz's latest patents include methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysis. One method involves removing a portion of a feature on the substrate using an electron beam to expose a cross-sectional profile of the remaining portion. This feature may be a photoresist feature, and the method also includes measuring a characteristic of the cross-sectional profile. Another method for preparing a substrate for analysis involves removing a portion of a material on the substrate near a defect using chemical etching combined with an electron beam. This defect may be a subsurface defect or a partially subsurface defect. Additionally, he has developed a charge-control method and apparatus for electron beam imaging, which includes scanning an electron beam over a target area of a substrate and detecting extracted secondary electrons.
Career Highlights
Mark Borowicz is currently employed at KLA-Tencor Technologies Corporation, where he applies his expertise in substrate analysis and imaging technologies. His work has been instrumental in advancing the capabilities of electron beam imaging and substrate preparation.
Collaborations
Throughout his career, Borowicz has collaborated with talented individuals such as Rudy Flores Garcia and Tzu Chin Chuang. These collaborations have contributed to the development of innovative solutions in the field.
Conclusion
Mark Borowicz's contributions to the field of substrate analysis and electron beam imaging highlight his innovative spirit and dedication to advancing technology. His patents reflect a commitment to improving methods and systems that are crucial in various applications.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.