Company Filing History:
Years Active: 1992-2013
Title: **Mark A Nokes: A Pioneer in Nanometer Scale Measurement Technologies**
Introduction
Mark A Nokes is a prominent inventor based in Palo Alto, California, renowned for his significant contributions to the field of measurement technologies. With an impressive portfolio, he holds six patents, showcasing his innovative spirit and technical expertise in developing advanced detection systems.
Latest Patents
One of Nokes' notable inventions is a detection system designed for nanometer scale topographic measurements of reflective surfaces. This system incorporates a linear position array detector that imparts light energy to a specimen's surface, such as a semiconductor wafer. It effectively receives and monitors the deviation of the retro-reflected beam to accurately map contours on the specimen surface. The technology ensures that the retro beam returns along the same path as the incident beam when the surface is normal to the beam. By employing a measurement device or sensor within the beam's path, this innovative design measures deviations with high precision. The sensor consists of a multiple element array of detector-diodes arranged in a linear configuration, and a unique weighting and summing scheme enhances the mechanical dynamic range while preserving sensitivity. Additionally, it features a bright field Nomarski Differential Interference Contrast sensor, which splits the beam into two for scanning in an orthogonal orientation relevant to the system's optical lever.
Career Highlights
Throughout his career, Mark A Nokes has made substantial contributions to various organizations. He has worked at High Yield Technology and KLA-Tencor Corporation, leveraging his expertise to develop cutting-edge technologies in semiconductor and optical measurement systems.
Collaborations
Nokes has had the opportunity to collaborate with esteemed colleagues such as Peter G. Borden and James B. Stolz. Their collective experience and insights have contributed to the advancement of measurement technologies, pushing the boundaries of innovation in their respective fields.
Conclusion
Mark A Nokes stands out as a distinguished inventor whose work continues to impact the industries of semiconductor measurement and optical technology. His dedication to advancing detection systems highlights the importance of innovation in achieving greater precision in the scientific community. As technology continues to evolve, Nokes' contributions will undoubtedly play a critical role in shaping the future of measurement techniques.