This inventor holds 2 USPTO granted patents and 1 EPO patent. Top assignees: Ihp Gmbh-Innovations for High Performance Microelectronics/leibniz-Institut Fur Innovative Mikroelektronik, Ihp Gmbh—innovations for High Performance Microelectronics/liebniz-Institut Fur Innovative Mikroelektronik. Active years: 2015-2017.
Company Filing History:
1 out of 35 
1 out of 2 Years Active: 2015-2017
Title: The Innovative Contributions of Mario Birkholz
Introduction
Mario Birkholz is a notable inventor based in Frankfurt-am-Main, Germany. He has made significant contributions to the field of microelectronics, particularly through his innovative patents. With a total of 2 patents, Birkholz has demonstrated his expertise in developing advanced technologies that enhance the functionality of microelectromechanical systems.
Latest Patents
Birkholz's latest patents include a MEMS microviscometer, which is a micro-electromechanical device designed for measuring the viscosity of fluids. This device features a measuring chamber with a micromechanical actuator that is arranged as a cantilever above a conductive counter electrode. The actuator is elastically deformable towards the counter electrode and is surrounded by the fluid being measured. The device utilizes a two-terminal RF voltage source to output a signal that deflects the actuator, allowing for precise measurement of viscosity-dependent speed.
Another significant patent is for an electromechanical microswitch that is integrated into a microelectromechanical system. This invention focuses on switching electrical signals, particularly in the GHz range. It comprises a multi-level conductive path layer stack on a substrate, with insulated conductive paths connected through via contacts. The integrated electromechanical switch includes a contact pivot and drive electrodes, forming a crucial part of the conductive level stack.
Career Highlights
Throughout his career, Mario Birkholz has worked with prominent organizations such as IHP GmbH - Innovations for High-Performance Microelectronics and the Leibniz Institute for Innovative Microelectronics. His work in these institutions has allowed him to contribute to cutting-edge research and development in microelectronics.
Collaborations
Birkholz has collaborated with various professionals in his field, including his coworker Karl-Ernst Ehwald. Their joint efforts have further advanced the innovations in microelectromechanical systems.
Conclusion
Mario Birkholz's contributions to the field of microelectronics through his patents and collaborations highlight his role as an influential inventor. His work continues to impact the development of advanced technologies in the industry.