The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 2015
Filed:
Dec. 07, 2010
Mehmet Kaynak, Frankfurt, DE;
Mario Birkholz, Frankfurt, DE;
Bernd Tillack, Frankfurt, DE;
Karl-ernst Ehwald, Frankfurt, DE;
René Scholz, Halle, DE;
Mehmet Kaynak, Frankfurt, DE;
Mario Birkholz, Frankfurt, DE;
Bernd Tillack, Frankfurt, DE;
Karl-Ernst Ehwald, Frankfurt, DE;
René Scholz, Halle, DE;
Abstract
The invention relates to a microelectromechanical system with an electromechanical microswitch for switching an electrical signal in particular a radio frequency signal, in particular in a GHz range, comprising a multi-level conductive path layer stack arranged on a substrate, wherein conductive paths of the multi-level conductive path layer stack arranged in different conductive levels are insulated from one another through electrically insulating layers and electrically connected with one another through via contacts, an electromechanical switch which is integrated in a recess of the multi-level conductive path layer stack and which includes a contact pivot, an opposite contact and at least one drive electrode for the contact pivot, wherein the contact pivot, the opposite contact and the at least one drive electrode respectively form a portion of a conductive level of the multi-level layer stack.