The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 02, 2017
Filed:
Jun. 19, 2013
Ihp Gmbh, Frankfurt, DE;
Mario Birkholz, Frankfurt, DE;
Jurgen Drews, Frankfurt, DE;
Karl-Ernst Ehwald, Frankfurt, DE;
Dieter Genschow, Rudersdorf OT Herzfelde, DE;
Ulrich Haak, Frankfurt, DE;
Philip Kulse, Berlin, DE;
Egbert Matthus, Frankfurt, DE;
Katrin Schulz, Frankfurt, DE;
Wolfgang Winkler, Frankfurt, DE;
Dirk Wolansky, Frankfurt, DE;
Marlen Frohlich, Magdeburg, DE;
Abstract
Micro-electromechanical device for measuring the viscosity of a fluid, comprises a measuring chamber with a micromechanical actuator, arranged as a cantilever above a metallically conductive counter electrode, elastically deformable towards the counter electrode, surrounded by the fluid to be measured and made of a metallically conductive material, a two-terminal RF voltage source that can be switched off, having a first output terminal connected to the actuator, and a second output terminal connected to the counter electrode, and which is designed to output an RF voltage signal that is suitable for deflecting the actuator out of its rest position, and a measuring device to detect a change in the frequency, amplitude or phase of the RF signal in order to determine a measurement value for the viscosity-dependent speed at which the actuator is deformed.