Mariko Shibata

Title: Mariko Shibata: Innovator in Substrate Processing Technology

Introduction

Mariko Shibata is a prominent inventor based in Miyagi, Japan. She has made significant contributions to the field of substrate processing technology. With a total of 2 patents, her work focuses on improving the efficiency and effectiveness of substrate processing systems.

Latest Patents

Mariko Shibata's latest patents include a substrate processing method, system, and program. This innovative method is designed for a substrate processing system that incorporates both a substrate processing device and a substrate transfer device. The substrate processing method consists of a substrate transfer step, which involves transferring a substrate, and a substrate processing step, which performs a predetermined process on the substrate. Notably, the method allows for at least two operations among the plurality of operations to be performed simultaneously. The substrate processing device features an accommodating chamber, a mounting table for the substrate, and a heat transfer gas supply line that supplies a heat transfer gas to the space between the substrate and the mounting table.

Career Highlights

Mariko Shibata has established herself as a key figure in her field through her innovative work at Tokyo Electron Limited. Her expertise in substrate processing technology has positioned her as a valuable asset to the company.

Collaborations

Throughout her career, Mariko has collaborated with notable colleagues, including Noriyuki Iwabuchi and Shigeaki Kato. These collaborations have further enhanced her contributions to the field.

Conclusion

Mariko Shibata is a trailblazer in substrate processing technology, with her innovative patents and collaborative efforts making a significant impact in the industry. Her work continues to inspire advancements in substrate processing systems.