This inventor holds 2 USPTO granted patents. Top assignees: Sandia Corporation, California Institute of Technology. Active years: 1999.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
2 out of 1,769 
1 out of 4,632 
Years Active: 1999
Title: The Innovations of Marc-A Nicolet
Introduction
Marc-A Nicolet is a notable inventor based in Pasadena, California. He has made significant contributions to the field of chemical vapor deposition, particularly in the synthesis of tungsten-silicon-nitrogen films. With a total of 2 patents, his work has implications for various technological applications.
Latest Patents
One of his latest patents is focused on the synthesis of W-Si-N films by chemical vapor deposition using WF.sub.6. This invention relates to the formation of amorphous or near-amorphous ternary films of W-Si-N on substrates. The method allows for conformal forming of these films on patterned non-planar substrates at temperatures at or below about 450°C. The typical temperature range for the formation of the films is between 473 K and 773 K, with reactor pressure varying between 0.1 to 50 Torr. The composition of the deposited films can be adjusted by varying the flow ratios of the reactive gases.
Another significant patent involves the chemical vapor deposition of W-Si-N and W-B-N. This method allows for the deposition of a ternary, refractory-based thin film on a substrate using precursor sources of tungsten, silicon, or boron, and nitrogen. The resulting W-Si-N or W-B-N thin films are useful for diffusion barrier and micromachining applications.
Career Highlights
Marc-A Nicolet has worked with prominent organizations such as Sandia Corporation and the California Institute of Technology. His experience in these institutions has contributed to his expertise in the field of chemical vapor deposition and materials science.
Collaborations
Throughout his career, Marc-A Nicolet has collaborated with notable individuals, including Claude Bernard and Paul M Smith. These collaborations have likely enriched his research and development efforts.
Conclusion
Marc-A Nicolet's contributions to the field of chemical vapor deposition and his innovative patents highlight his role as a significant inventor. His work continues to influence advancements in materials science and engineering.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile