San Jose, CA, United States of America

Mani Subramani

USPTO Granted Patents = 6 

Average Co-Inventor Count = 3.9

ph-index = 4

Forward Citations = 55(Granted Patents)


Company Filing History:


Years Active: 2001-2023

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6 patents (USPTO):

Title: The Innovations of Mani Subramani

Introduction

Mani Subramani is a notable inventor based in San Jose, CA, who has made significant contributions to the field of plasma processing technology. With a total of 6 patents to his name, he has demonstrated a commitment to advancing innovative solutions in his area of expertise.

Latest Patents

One of Mani Subramani's latest patents is titled "Modular Microwave Source with Local Lorentz Force." This invention encompasses methods and apparatuses that include a plasma processing tool featuring a plurality of magnets. In one embodiment, the plasma processing tool comprises a processing chamber and multiple modular microwave sources coupled to the processing chamber. The modular microwave sources include an array of applicators positioned over a dielectric plate, which forms part of the outer wall of the processing chamber, along with an array of microwave amplification modules. Each microwave amplification module is coupled to one or more of the applicators in the array. Additionally, the plasma processing tool may include a plurality of magnets strategically positioned around one or more of the applicators to enhance its functionality.

Career Highlights

Mani Subramani is currently employed at Applied Materials, Inc., a leading company in the field of materials engineering. His work at Applied Materials has allowed him to focus on developing cutting-edge technologies that improve plasma processing techniques.

Collaborations

Throughout his career, Mani has collaborated with several talented individuals, including Sergio Edelstein and Jaim Nulman. These collaborations have contributed to the advancement of innovative solutions in their respective fields.

Conclusion

In summary, Mani Subramani is a distinguished inventor whose work in plasma processing technology has led to several patents and significant advancements in the industry. His contributions continue to shape the future of materials engineering.

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