Company Filing History:
1 out of 4 
1 out of 33 Years Active: 1995-2016
Title: Manabu Saeda: Innovator in Semiconductor Manufacturing
Introduction
Manabu Saeda is a notable inventor based in Moriyama, Japan. He has made significant contributions to the field of semiconductor manufacturing, holding 2 patents that showcase his innovative approaches to improving manufacturing processes.
Latest Patents
One of his latest patents is a method for treating the inner surface of a chlorine trifluoride supply passage in apparatus using chlorine trifluoride. This method enables reliable prevention of the reduction in the concentration of chlorine trifluoride in a reaction chamber during process operation. It involves integrally connecting a gas supply passage and a gas discharge passage to a processing chamber where chlorine trifluoride is used as an etching gas. The method applies chlorine trifluoride gas with a concentration equal to or higher than that supplied during etching process operation to coat the inner surfaces of the processing chamber and the gas supply passage with a fluoride film.
Another significant patent is a non-plasma cleaning method for semiconductor manufacturing apparatus. This method addresses the removal of a laminar deposit in a thin film forming operational system. It introduces a mixture gas of nitrogen trifluoride and a fluoric gas into the system to contact the laminar deposit in a non-plasma state, effectively facilitating the cleaning process.
Career Highlights
Throughout his career, Manabu Saeda has worked with prominent companies, including Iwatani Sangyo Kabushiki Kaisha and Iwatani Corporation. His experience in these organizations has contributed to his expertise in semiconductor manufacturing technologies.
Collaborations
Manabu has collaborated with notable coworkers such as Hideki Odajima and Chitoshi Nogami. Their collective efforts have further advanced the innovations in the semiconductor field.
Conclusion
Manabu Saeda's contributions to semiconductor manufacturing through his patents and collaborations highlight his role as an influential inventor in the industry. His innovative methods continue to impact the efficiency and effectiveness of semiconductor production processes.