Mamoru Sugita

Title: Mamoru Sugita: Innovator in Exposure Technology

Introduction

Mamoru Sugita is a notable inventor based in Kumamoto, Japan. He has made significant contributions to the field of exposure technology, particularly in methods and apparatuses that enhance substrate processing. His innovative approach has led to the development of a unique exposure method that optimizes the efficiency of substrate treatment.

Latest Patents

Sugita holds a patent for an exposure method and apparatus designed to improve the processing of substrates. This method involves radiating exposure light onto the peripheral portion of a rotating substrate. The rotational speed of the substrate is selectively decreased when a specific peripheral portion reaches the exposure area, allowing for predetermined exposure of the substrate. The apparatus includes a mounting table, a rotating mechanism, a light radiating element, light amount control means, and rotational speed control means, all working together to achieve precise exposure.

Career Highlights

Throughout his career, Mamoru Sugita has worked with prominent companies in the technology sector. He has been associated with Tokyo Electron Limited, a leading manufacturer of semiconductor production equipment. Additionally, he has contributed his expertise to Tel Kyushu Limited, further enhancing his experience in the field.

Collaborations

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Conclusion

Mamoru Sugita's innovative work in exposure technology has made a significant impact on substrate processing methods. His patent reflects a deep understanding of the complexities involved in this field, showcasing his dedication to advancing technology.