Location History:
- Burghausen, DE (2012 - 2014)
- Kakamigahara, JP (2019)
Company Filing History:
Years Active: 2012-2019
Title: The Innovations of Inventor Makoto Tabata
Introduction
Makoto Tabata, a distinguished inventor based in Kakamigahara, Japan, has made significant contributions to the field of semiconductor technology. With a total of three patents to his name, his innovative methods have advanced the processes involved in polishing semiconductor wafers, which are crucial for the manufacturing of electronic devices.
Latest Patents
Makoto Tabata's latest patents focus on advanced techniques for polishing semiconductor wafers. One notable patent describes a method for polishing at least one wafer composed of semiconductor material, which involves simultaneously polishing both the front and rear sides of the wafer at a controlled process temperature. The unique design of the polishing plates, covered by specialized pads, allows for precise control over the polishing gap, enhancing the overall efficiency and effectiveness of wafer polishing.
Another remarkable patent outlines a method for chemical mechanical planarization (CMP) of semiconductor wafers, wherein it details a specific material removal profile. In this method, the rear side of the semiconductor wafer is polished in such a way that removal is higher at the center than at the edges. Conversely, the front side undergoes a lower material removal at the center compared to the edge region. These innovations not only improve wafer surface quality but also optimize manufacturing processes.
Career Highlights
Makoto Tabata is currently associated with Siltronic AG, a leading company in the semiconductor industry. His career is marked by a profound commitment to innovation and excellence in semiconductor manufacturing processes. His advancements in wafer polishing methodologies are a testament to his expertise and dedication to the field.
Collaborations
Throughout his career, Makoto has worked alongside esteemed colleagues, including Klaus Roettger and Clemens Zapilko. These collaborations have fostered an environment of innovation and mutual growth, contributing to the development of cutting-edge technologies in semiconductor wafer processing.
Conclusion
Makoto Tabata's contributions to the semiconductor industry through his patented inventions demonstrate his exceptional skills as an inventor. His work at Siltronic AG, combined with his collaborative efforts, continues to drive advancements in semiconductor technology, paving the way for future innovations in the field.