Makoto Murata

Title: **The Innovative Journey of Makoto Murata**

Introduction

Makoto Murata, an accomplished inventor based in Yokkaichi, Japan, has made significant contributions to the field of radiation-sensitive resin compositions. With a total of eight patents to his name, he has become a notable figure in the world of innovations, particularly in chemical engineering and material science.

Latest Patents

Among his most recent patents, Murata has developed a radiation-sensitive resin composition that is of great interest in various technological applications. This composition includes a photoacid generator, such as 2,4,6-trimethylphenyldiphenylsulfonium 2,4-difluorobenzenesulfonate or its counterpart with 4-trifluoromethylbenzene sulfonate. The resin itself features an acetal structure typified by a poly(p-hydroxystyrene) type resin, where hydrogen atoms of phenolic hydroxyl groups have been partially replaced by 1-ethoxyethyl groups and t-butoxycarbonyl groups, or t-butyl groups. This innovative composition is sensitive to deep ultraviolet rays and charged particles like electron beams, demonstrating excellent resolution performance, remarkable pattern shape-forming capabilities, and minimal nano-edge roughness.

Career Highlights

Throughout his career, Murata has worked with prominent companies, including Japan Synthetic Rubber Co., Ltd. and JSR Corporation. His work has established him as a leader in developing materials that push the boundaries of technology in various industries, particularly in semiconductor manufacturing and other related fields.

Collaborations

Throughout his career, Makoto Murata has collaborated with esteemed colleagues such as Eiichi Kobayashi and Toshiyuki Ota. Together, they have contributed to advancing technology and enhancing the functionality of radiation-sensitive materials, showcasing the power of teamwork in the realm of innovation.

Conclusion

In summary, Makoto Murata's achievements in the field of radiation-sensitive resin compositions highlight his role as an influential inventor. With a strong foundation built on collaboration and significant industry experience, he continues to be a key player in driving forward innovative solutions that meet the demands of modern technology. His patents reflect a deep understanding of materials science and a commitment to excellence in his craft.