Makoto Kashibe

Title: **Innovative Contributions of Makoto Kashibe**

Introduction

Makoto Kashibe, an accomplished inventor based in Tokuyama, Japan, has made significant strides in the field of semiconductor technology. With three patents to his name, his innovative work focuses on ways to enhance the precision and reliability of semiconductor fabrication processes.

Latest Patents

Kashibe's recent contributions include a power supply, a semiconductor making apparatus, and a semiconductor wafer fabricating method. His inventions enable the detection of anomalies in closed-loop systems for high-frequency power supply or DC power supply used in semiconductor manufacturing. Specifically, the power supply is designed to receive a power value setting signal and an on/off instruction for outputting power. This design allows for interruptions in power supply whenever a sensed power value exceeds a predetermined limit, even when the subsequent power on/off instruction remains active.

Furthermore, Kashibe developed a plasma processing apparatus and method that allows for high-precision etching without damaging the semiconductor wafers. This system comprises a plasma generation power supply to create plasma within a processing chamber and a high-frequency power supply for applying waves to a sample stage. Control mechanisms are in place to adjust settings for output intensity and mode dynamically during different process steps, ensuring optimal processing conditions.

Career Highlights

Kashibe's professional journey has been marked by his association with Hitachi High-Technologies Corporation. There, he has honed his expertise in semiconductor technologies, working on various projects that enhance manufacturing efficiency and product quality.

Collaborations

Throughout his career, Kashibe has collaborated with notable colleagues such as Youji Takahashi and Tsutomu Iida. Their teamwork has undoubtedly contributed to the advancement of innovations in the semiconductor field, reflecting the importance of collaboration in driving technological progress.

Conclusion

Makoto Kashibe's contributions to the semiconductor industry through his innovative patents demonstrate his commitment to enhancing technological capabilities. His work not only helps to improve production processes but also contributes significantly to the advancement of the semiconductor field as a whole. As technology continues to evolve, Kashibe's inventions stand as a testament to the impact of dedicated innovators in shaping the future.