The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 2006
Filed:
Sep. 04, 2003
Youji Takahashi, Kudamatsu, JP;
Tsutomu Iida, Kudamatsu, JP;
Tsuyoshi Umemoto, Yamato, JP;
Makoto Kashibe, Tokuyama, JP;
Youji Takahashi, Kudamatsu, JP;
Tsutomu Iida, Kudamatsu, JP;
Tsuyoshi Umemoto, Yamato, JP;
Makoto Kashibe, Tokuyama, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
In power supply and a semiconductor making apparatus and a semiconductor fabricating method using the same, an abnormality can be detected when an offset occurs in a part constituting a closed-loop system of high-frequency power supply or dc power supply for a semiconductor making apparatus. Power supply for receiving a power value setting signal to set strength of power and a power on/off instruction to set on or off of outputting of the power interrupts the supply of the power even in a state in which a subsequent power on/off instruction is on if a power sense signal according to a value obtained by sensing the power exceeds a predetermined value when the power on/off instruction is off.