Lun-Tseng Lu

Title: Lun-Tseng Lu: Innovator in Semiconductor Technology

Introduction

Lun-Tseng Lu is a notable inventor based in Grand Prairie, TX (US), recognized for his contributions to semiconductor technology. With a total of 5 patents, he has made significant advancements in the field of integrated circuits.

Latest Patents

One of his latest patents is titled "Semiconductor contact via structure." This patent describes a method for forming contact vias in integrated circuits. The process begins with the formation of a first buffer layer over an insulating layer, which has a different etch rate than the insulating layer. A second buffer layer is then added, featuring a faster etch rate. This allows for controlled slanting of the opening's sidewalls during the etching process. An anisotropic etch completes the formation of the contact via.

Another significant patent is "Method for forming interconnect in integrated circuits." This invention outlines a structure and method for fabricating integrated circuits that can detect residual conductive material. A first conductive layer is deposited and patterned to create a first interconnect layer, followed by the formation of an insulating layer. A second conductive layer is then added and patterned to define a second interconnect layer. The method enhances the detectability of residual conductive material by increasing its conductivity through impurity implantation or siliciding with a refractory metal.

Career Highlights

Lun-Tseng Lu has worked with prominent companies in the semiconductor industry, including SGS-Thomson Microelectronics Limited and STMicroelectronics GmbH. His experience in these organizations has contributed to his expertise and innovative capabilities in semiconductor technology.

Collaborations

Throughout his career, Lun-Tseng Lu has collaborated with talented individuals, including Che-Chia Wei and Yih-Shung Lin. These collaborations have fostered a creative environment that has led to significant advancements in their respective fields.

Conclusion

Lun-Tseng Lu's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor. His innovative methods continue to shape the future of integrated circuits and semiconductor applications.