Location History:
- Mesa, AZ (US) (2014 - 2017)
- Chandler, AZ (US) (2017)
Company Filing History:
Years Active: 2014-2017
Title: Inventor Spotlight: Luling Wang from Mesa, AZ
Introduction
Luling Wang is an accomplished inventor based in Mesa, Arizona, renowned for his contributions to the semiconductor industry. With a remarkable portfolio comprising six patents, Wang's innovations significantly advance the field of polishing compositions used in semiconductor manufacturing.
Latest Patents
Among his latest patents, Luling Wang developed a patent for polishing compositions and methods specifically designed for polishing cobalt films. This innovative composition is instrumental for semiconductor substrates that contain various films, including cobalt, metals, metal oxides, and dielectrics. The formulation includes an abrasive, a weak acid that serves as a removal rate enhancer, a pH adjuster, and an azole-containing corrosion inhibitor. Notably, these components exhibit pKa values within the range of 1-18, ensuring efficient polishing under specific pH conditions. Wang's compositions are also distinguished by having less than 100 parts per million of sulfate and halide ions, operating effectively within a pH range of 7-12.
Career Highlights
Throughout his career, Luling Wang has made significant strides in technology. He has worked with esteemed organizations, including Fujifilm Planar Solutions, LLC, and the University of Pittsburgh, contributing to advancements in research and product development. His work has enhanced the capabilities of semiconductor manufacturing processes, particularly in the polishing sector.
Collaborations
Wang has collaborated with notable individuals in his field, including Abhudaya Mishra and Deepak Mahulikar. These partnerships have facilitated the development of groundbreaking technologies and fostered knowledge exchange within the semiconductor industry.
Conclusion
Luling Wang’s innovative contributions to the field of semiconductor technology are commendable. With six patents to his name, his work in polishing compositions for cobalt films underscores the importance of precision in semiconductor manufacturing. As technology continues to evolve, inventors like Wang will play a crucial role in shaping the future of the industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.