Liu Zhenduo

Title: Liu Zhenduo: Innovator in Predictive Control Systems

Introduction

Liu Zhenduo is a notable inventor based in Amersfoort, Netherlands. He has made significant contributions to the field of predictive control systems, particularly in the thermal processing of semiconductor substrates. His innovative approach combines advanced modeling techniques with conventional control systems to enhance efficiency and reliability.

Latest Patents

Liu Zhenduo holds a patent for a "Hybrid cascade model-based predictive control system." This invention focuses on a hybrid cascade Model-Based Predictive Control (MBPC) and conventional control system designed for thermal processing equipment, specifically for vertical thermal reactors. The system utilizes a PID controller as part of its conventional control framework. The MBPC algorithm integrates multiple linear dynamic mathematical models and non-linear static mathematical models, derived from closed-loop modeling control data through a closed-loop identification method. To ensure effective dynamic linear models, the desired temperature control range is segmented into several sub-ranges, with corresponding dynamic models identified for each heating zone. The control system incorporates fuzzy control logic and an inference engine that automatically switches dynamic models based on actual temperature readings. In cases of thermocouple (TC) measurement failure, a software soft sensor based on dynamic model computing replaces the real TC sampling, ensuring that the process can continue without loss of the semiconductor substrates being processed.

Career Highlights

Liu Zhenduo is currently employed at ASML Holding N.V., a leading company in the semiconductor industry. His work focuses on developing advanced control systems that improve the performance and reliability of thermal processing equipment. His innovative contributions have positioned him as a key figure in the field of semiconductor technology.

Collaborations

Liu collaborates with Frank Huussen, a fellow innovator in the industry. Together, they work on enhancing the capabilities of predictive control systems and exploring new methodologies for semiconductor processing.

Conclusion

Liu Zhenduo's contributions to predictive control systems represent a significant advancement in semiconductor technology. His innovative patent and collaborative efforts continue to influence the industry positively.