The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 10, 2026

Filed:

Jun. 29, 2023
Applicant:

Asm Ip Holding, B.v., Almere, NL;

Inventors:

Liu Zhenduo, Amersfoort, NL;

Theodorus G.M. Oosterlaken, Oudewater, NL;

Assignee:

ASM IP Holding B.V., Almere, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05D 23/19 (2006.01); H05B 1/02 (2006.01);
U.S. Cl.
CPC ...
G05D 23/1931 (2013.01); H05B 1/0247 (2013.01);
Abstract

Temperature control systems and methods for a thermal reactor having a process chamber, the control system comprising a first control loop comprising a first Model-Based Predictive Controller (MBPC) and a second control loop comprising a second MBPC, wherein the first and second MBPC are provided with predictive models representing the behavior of the thermal reactor.


Find Patent Forward Citations

Zhenduo, Liu. (2026). Dual model-based temperature controller (U.S. Patent No. 12572164). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12572164

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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