Location History:
- Charlottenlund, DK (2006)
- San Jose, CA (US) (2006 - 2013)
Company Filing History:
3 out of 1,787 
2 out of 641 
Years Active: 2006-2013
Title: Innovations of Lionel Kuhlmann
Introduction
Lionel Kuhlmann is a notable inventor based in San Jose, CA, who has made significant contributions to the field of optical measurement systems. With a total of 5 patents to his name, Kuhlmann's work focuses on advancing technologies that enhance the precision of topographic measurements.
Latest Patents
One of Kuhlmann's latest patents is a detection system for nanometer scale topographic measurements of reflective surfaces. This innovative system employs a linear position array detector that imparts light energy to a specimen's surface, such as a semiconductor wafer. It receives light energy from the specimen and monitors deviations in the retro or reflected beam to accurately map the contours of the surface. The system is designed to ensure that the retro beam returns along the same path as the incident beam, provided the surface is normal to the beam. A measurement device or sensor is integrated within the path of the retro beam to measure any deviations. This sensor consists of a multiple element array of detector-diodes arranged in a linear fashion. Kuhlmann's unique weighting and summing scheme enhances the mechanical dynamic range while maintaining sensitivity. Additionally, the system incorporates a bright field Nomarski Differential Interference Contrast sensor, which splits the beam into two and scans in an orientation orthogonal to the optical lever created by the system.
Career Highlights
Throughout his career, Kuhlmann has worked with prominent companies in the industry, including Kla Tencor Corporation and Kla-Tencor Technologies Corporation. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking innovations in optical measurement technologies.
Collaborations
Kuhlmann has collaborated with notable professionals in his field, including Henrik Nielsen and Mark A. Nokes. These collaborations have further enriched his work and expanded the impact of his inventions.
Conclusion
Lionel Kuhlmann's contributions to the field of optical measurement systems demonstrate his innovative spirit and dedication to advancing technology. His patents reflect a commitment to precision and accuracy in measurements, making him a significant figure in the realm of inventions.