Kalispell, MT, United States of America

LinLin Chen

USPTO Granted Patents = 15 


Average Co-Inventor Count = 2.2

ph-index = 12

Forward Citations = 853(Granted Patents)


Company Filing History:


Years Active: 2001-2008

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15 patents (USPTO):Explore Patents

Title: LinLin Chen: Innovator in Microelectronic Device Production

Introduction

LinLin Chen is a prominent inventor based in Kalispell, MT (US), known for her significant contributions to the field of microelectronics. With a total of 15 patents to her name, she has made remarkable advancements in the production of microelectronic devices.

Latest Patents

Among her latest patents is a method for low-temperature annealing of metallization microstructures in the production of a microelectronic device. This innovative method involves filling recessed microstructures at the surface of a microelectronic workpiece, such as a semiconductor wafer, with metallization. The process utilizes an electroplating technique that generates small metal grains, allowing for optimal filling of the microstructures. The deposited metal undergoes an annealing process at temperatures below 100 degrees Celsius, and in some cases, even at ambient room temperature, to promote grain growth and enhance electrical properties. Additionally, various novel apparatuses for executing unique annealing processes are also included in her patents.

Career Highlights

LinLin Chen has established herself as a key figure in her field through her work at Semitool, Inc. Her innovative approaches and dedication to advancing microelectronic technology have garnered her recognition and respect among her peers.

Collaborations

Throughout her career, LinLin has collaborated with notable colleagues, including Daniel J Woodruff and Kyle Moran Hanson. These partnerships have contributed to her success and the development of her groundbreaking inventions.

Conclusion

LinLin Chen's contributions to microelectronic device production through her innovative patents and collaborative efforts highlight her as a leading inventor in the field. Her work continues to influence advancements in technology and improve the efficiency of microelectronic devices.

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