The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 22, 2005
Filed:
Oct. 30, 2001
Daniel J. Woodruff, Kalispell, MT (US);
Kyle M. Hanson, Kalispell, MT (US);
Thomas H. Oberlitner, Kalispell, MT (US);
Linlin Chen, Kalispell, MT (US);
John M. Pedersen, Kalispell, MT (US);
Vladimir Zila, Scarborough, CA;
Daniel J. Woodruff, Kalispell, MT (US);
Kyle M. Hanson, Kalispell, MT (US);
Thomas H. Oberlitner, Kalispell, MT (US);
LinLin Chen, Kalispell, MT (US);
John M. Pedersen, Kalispell, MT (US);
Vladimir Zila, Scarborough, CA;
Semitool, Inc., Kalispell, MT (US);
Abstract
A reactor for plating a metal onto a surface of a workpiece is set forth. The reactor comprises a reactor bowl including an electroplating solution disposed therein and an anode disposed in the reactor bowl in contact with the electroplating solution. A contact assembly is spaced from the anode within the reactor bowl. The contact assembly includes a plurality of contacts disposed to contact a peripheral edge of the surface of the workpiece to provide electroplating power to the surface of the workpiece. The contacts execute a wiping action against the surface of the workpiece as the workpiece is brought into engagement therewith The contact assembly also including a barrier disposed interior of the plurality of contacts. The barrier includes a member disposed to engage the surface of the workpiece to assist in isolating the plurality of contacts from the electroplating solution.