Company Filing History:
Years Active: 2014-2015
Title: Lin-Ya Huang: Innovator in Semiconductor Technology
Introduction
Lin-Ya Huang is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly through his innovative methods for forming trenches and shallow recessed wells in substrates. With a total of 2 patents, Huang continues to push the boundaries of what is possible in semiconductor manufacturing.
Latest Patents
Huang's latest patents include a method to form multiple trenches utilizing a grayscale mask. This method involves a single photo exposure and etch process to create a plurality of openings within a substrate. The process utilizes a photoresist layer aligned with a photomask that features transparent, grayscale, and opaque areas. This innovative approach allows for the formation of a 3-dimensional pattern with varying depths in a single etch step.
Another notable patent is for shallow via formation by oxidation. This method and its associated apparatus are designed to construct shallow recessed wells on exposed conductive vias on the surface of a semiconductor. The wells are filled with a conductive cap layer, such as tantalum nitride (TaN), to prevent oxidation that may occur when exposed to air or during metallization processes.
Career Highlights
Lin-Ya Huang is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work has been instrumental in advancing manufacturing techniques that enhance the efficiency and reliability of semiconductor devices.
Collaborations
Huang has collaborated with notable colleagues, including Chi-Sheng Juan and Chien-Lin Tseng. These partnerships have fostered an environment of innovation and creativity, contributing to the success of their projects.
Conclusion
Lin-Ya Huang is a key figure in semiconductor innovation, with a focus on developing advanced methods for substrate processing. His contributions are shaping the future of semiconductor technology and enhancing manufacturing capabilities.