Lin-hsin Tu

Title: Lin-hsin Tu and Reticle Pod Inspection Innovations.

Introduction

Lin-hsin Tu is an inventor based in Taipei, Taiwan, whose patent work focuses on optical inspection technologies for reticle pods and their components. His inventions address inspection precision and efficiency, with applications relevant to semiconductor manufacturing equipment. Tu is associated with Gudeng Equipment Co., Ltd. The supplied information lists 3 patents.

Latest Patents

Tu’s latest patents describe two optical inspection systems.

“Inspection Device for Sub-Element of Reticle Pod” presents a device that uses a carrier platform, a coaxial light source, a camera module, and a control module. A height adjustment mechanism changes the relative distance between the light source and the carrier platform, enabling optical inspection of a reticle pod sub-element.

“Optical Inspection Device for Surface of Reticle Pod and Optical Inspection Method for Surface of Reticle Pod” describes a system with two light sources that illuminate a carrier surface from different directions. The control module switches between the sources, supporting an inspection method intended to examine reticle pod surfaces efficiently and precisely.

Career Highlights

Tu’s listed patent portfolio centers on optical inspection equipment and methods. The inventions use adjustable lighting, camera modules, and controlled illumination to inspect reticle pod components and surfaces.

Collaborations

Tu’s listed coworkers include Yin-feng Chan and Ming-mo Lo. His work is associated with Gudeng Equipment Co., Ltd.

Conclusion

Lin-hsin Tu’s patent work addresses practical inspection challenges through optical systems designed for reticle pod components and surfaces.