Liguang Lan

Title: Liguang Lan - Innovator in Semiconductor Technology

Introduction

Liguang Lan is a prominent inventor based in Beijing, China. He has made significant contributions to the field of semiconductor technology, particularly through his innovative designs and patents. His work focuses on enhancing the efficiency and functionality of semiconductor thermal processing equipment.

Latest Patents

Liguang Lan holds 1 patent for a gas injection device of semiconductor thermal processing equipment. This patent describes a device that includes an inlet pipe, with a first pipe segment featuring a first pipe wall and a second pipe wall embedded within it. A buffer space is created between the inner wall of the first pipe wall and the outer wall of the second pipe wall. The design incorporates a plurality of first air holes that are evenly distributed along a vertical direction on the first pipe wall, allowing communication with the buffer space and the process chamber. Additionally, the second pipe wall contains a plurality of second air holes that connect the internal space of the second pipe wall with the buffer space.

Career Highlights

Liguang Lan is associated with Beijing Naura Microelectronics Equipment Co., Ltd., where he applies his expertise in semiconductor technology. His role at the company allows him to contribute to the development of advanced microelectronics equipment, which is crucial for modern technological applications.

Conclusion

Liguang Lan's innovative work in semiconductor thermal processing equipment showcases his commitment to advancing technology in this critical field. His patent reflects a significant step forward in improving the efficiency of semiconductor manufacturing processes.