Company Filing History:
Years Active: 2010
Title: The Innovative Contributions of Liang-Guo Wang
Introduction
Liang-Guo Wang is a notable inventor based in San Jose, California. He has made significant contributions to the field of substrate conditioning, particularly in the area of corona charge control. His innovative work has led to the development of a unique measurement system that enhances the reliability of QV measurements on substrates.
Latest Patents
Liang-Guo Wang holds a patent for a system titled "Substrate conditioning for corona charge control." This patent describes a measurement system designed to take readings in a test zone on the surface of a substrate. The system includes a chamber that creates an environment for testing, a surface treatment station that dispenses a stabilizing chemical, a charge deposition station that deposits a charge, and a QV measurement station that takes measurements in the test zone. The interaction of these components within the chamber allows for reliable QV measurements by controlling charge spreading with the stabilizing chemical. Additionally, the system improves QV measurement stability by minimizing the influence of time trending on substrates with reactive dielectrics, such as silicon oxynitride and high-k surfaces.
Career Highlights
Liang-Guo Wang is currently employed at Kla Tencor Corporation, where he continues to innovate and contribute to advancements in substrate technology. His work has been instrumental in enhancing measurement systems that are critical for various applications in the semiconductor industry.
Collaborations
Liang-Guo Wang has collaborated with several talented individuals in his field, including Nanchang Zhu and Jainou Shi. These collaborations have fostered a productive environment for innovation and have led to further advancements in their respective areas of expertise.
Conclusion
Liang-Guo Wang's contributions to substrate conditioning and charge control have made a significant impact in the field of semiconductor technology. His innovative patent and ongoing work at Kla Tencor Corporation highlight his dedication to advancing measurement systems.