Company Filing History:
Years Active: 2011-2012
Title: Lemuel Chen: Innovator in Chemical Oxide Removal Processes
Introduction
Lemuel Chen is a notable inventor based in Taoyuan, Taiwan. He has made significant contributions to the field of chemical processing, particularly in the area of chemical oxide removal. With a total of 2 patents to his name, Chen's work is recognized for its innovative approach and technical sophistication.
Latest Patents
Chen's latest patents focus on a method and system for performing a chemical oxide removal process. This processing system includes a first treatment chamber and a second treatment chamber that are coupled to one another. The first treatment chamber is designed as a chemical treatment chamber that provides a temperature-controlled environment. It features an independently temperature-controlled substrate holder that supports a substrate for chemical treatment. The substrate is exposed to a gaseous chemistry, such as HF/NH, under controlled conditions, including surface temperature and gas pressure. The second treatment chamber serves as a heat treatment chamber, which is thermally insulated from the chemical treatment chamber. This chamber also provides a substrate holder that controls the temperature of the substrate to thermally process the chemically treated surfaces.
Career Highlights
Lemuel Chen is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at this organization has allowed him to develop and refine his innovative processes, contributing to advancements in chemical processing technologies.
Collaborations
Throughout his career, Chen has collaborated with several talented individuals, including Masayuki Tomoyasu and Merritt Funk. These collaborations have fostered a creative environment that has led to the development of cutting-edge technologies in the field.
Conclusion
Lemuel Chen's contributions to the field of chemical oxide removal processes highlight his innovative spirit and technical expertise. His patents reflect a commitment to advancing technology in chemical processing, making him a significant figure in his industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.