LeGrand G Van Uitert

Title: **LeGrand G. Van Uitert: Innovator in Semiconductor Technology**

Introduction

LeGrand G. Van Uitert, based in Morristown, NJ, has made significant contributions to the field of semiconductor technology. With a portfolio of 13 patents, his innovations focus on advanced processes for fabricating semiconductor devices. His expertise and groundbreaking inventions have established him as an influential figure in the industry.

Latest Patents

Among his latest patents, Van Uitert introduced a novel **Procedure for Rapid Thermal Annealing of Implanted Semiconductors**. This invention aims to enhance the fabrication of semiconductor devices utilizing III-V and II-VI compound semiconductor materials. The process involves Rapid Thermal Annealing (RTA) of semiconductor wafers, particularly those implanted with dopants. The patent describes a method where a wafer is enclosed within a 'black-box' made of black body material, which is subjected to the RTA process. The steps include a pre-anneal to reduce thermal shock, a main annealing step to activate implanted dopants and a post-anneal to relieve residual stresses. This innovative approach ensures that wafers achieve high mobilities and uniform activation while remaining free of slip lines.

Another notable patent is the **Coating for Optical Devices**, which outlines a surface coating designed for passivation or anti-reflection purposes. The coating consists of ZrO2 doped with yttrium, magnesium, or calcium. This doped zirconia is deposited on the device surface through electron-beam evaporation from a single crystal source. This invention underlines Van Uitert's versatility in enhancing the performance of optical devices within the semiconductor sector.

Career Highlights

Throughout his career, LeGrand G. Van Uitert has been associated with prestigious organizations, including Bell Telephone Laboratories and AT&T Bell Laboratories. His work at these institutions has facilitated groundbreaking advancements in semiconductor technology and device fabrication.

Collaborations

Van Uitert has collaborated with notable professionals in the industry, including Shobha Singh and George J. Zydzik. These partnerships have contributed to the innovation and successful development of multiple technologies that continue to impact the field of semiconductors.

Conclusion

LeGrand G. Van Uitert's contributions to the field of semiconductor technology through his inventive processes and coatings have paved the way for advancements in device fabrication. His extensive patent portfolio reflects his commitment to innovation and excellence, making him a respected figure in the semiconductor community.