This inventor holds 4 USPTO granted patents and 4 published patent applications. Top assignee: Texas Instruments Corporation. Active years: 2008-2010.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Murphy, TX (US) (2008 - 2010)
- Macungie, PA (US) (2010)
Company Filing History:
Years Active: 2008-2010
Title: Laura M Matz: Innovator in Semiconductor Processing
Introduction
Laura M Matz is a prominent inventor based in Murphy, TX (US), known for her contributions to semiconductor processing technologies. With a total of 4 patents, she has made significant advancements in the field, particularly in methods that enhance the efficiency and effectiveness of semiconductor manufacturing.
Latest Patents
One of her latest patents focuses on the monitoring of temperature variation across wafers during processing. This innovative method involves establishing a correlation between peak wafer temperature during a processing step and subsequent changes in wafer surface charge or surface potential. By measuring the surface charge or potential at various locations on the wafer, a peak temperature spatial distribution can be determined, which is crucial for optimizing processing conditions.
Another notable patent addresses plasma treatment and repair processes aimed at reducing sidewall damage in low-k dielectrics. This method outlines the formation of an interconnect structure for integrated circuits, detailing the steps of substrate preparation, dielectric stack formation, and plasma processing. The in situ plasma treatment process, which includes the introduction of hydrocarbons, is designed to enhance the integrity of the low-k dielectric layer, ultimately improving the performance of semiconductor devices.
Career Highlights
Laura Matz is currently employed at Texas Instruments Corporation, where she applies her expertise in semiconductor technologies. Her work has been instrumental in developing innovative solutions that address the challenges faced in the semiconductor industry.
Collaborations
Throughout her career, Laura has collaborated with several talented individuals, including Rosa A Orozco-Teran and Ping Jiang. These collaborations have fostered a creative environment that encourages the exchange of ideas and the development of groundbreaking technologies.
Conclusion
Laura M Matz is a distinguished inventor whose work in semiconductor processing has led to significant advancements in the field. Her innovative patents and contributions to Texas Instruments Corporation highlight her commitment to enhancing semiconductor manufacturing processes.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile