Company Filing History:
Years Active: 2002-2003
Title: Laizhong Luo: Innovator in Semiconductor Technology
Introduction
Laizhong Luo is a prominent inventor based in Fremont, CA (US). He has made significant contributions to the field of semiconductor technology, holding a total of 2 patents. His work focuses on innovative systems and methods that enhance semiconductor processing.
Latest Patents
Luo's latest patents include groundbreaking systems and methods for two-sided etch of a semiconductor substrate. This technology involves generating reactive species that are flowed toward a substrate for processing. A diverter is strategically positioned between the generation chamber and the substrate. A portion of the reactive species flows through the diverter to process the front of the substrate, while another portion is diverted around the substrate to the backside for processing. Additionally, a flow restricter is placed between the substrate and the exhaust system to increase the residence time of reactive species adjacent to the backside.
Career Highlights
Laizhong Luo is currently employed at Mattson Technology, Inc., where he continues to develop innovative solutions in semiconductor processing. His expertise and dedication to advancing technology have made him a valuable asset to the company.
Collaborations
Luo collaborates with talented individuals such as Ying Holden and Rene George, contributing to a dynamic work environment that fosters innovation.
Conclusion
Laizhong Luo's contributions to semiconductor technology through his patents and work at Mattson Technology, Inc. highlight his role as a key innovator in the field. His advancements in two-sided etch systems are paving the way for future developments in semiconductor processing.