This inventor holds 2 USPTO granted patents and 4 published patent applications. Top assignee: Entegris, Inc.. Active years: 2019-2020.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2019-2020
Title: Laisheng Sun: Innovator in Microelectronic Device Cleaning Solutions
Introduction
Laisheng Sun is a notable inventor based in Danbury, CT (US), recognized for his contributions to the field of microelectronics. He holds 2 patents that focus on innovative cleaning compositions and methods for post-chemical mechanical polishing (CMP) processes. His work is essential for maintaining the integrity of microelectronic devices during manufacturing.
Latest Patents
Laisheng Sun's latest patents include formulations and methods that significantly enhance the cleaning process of microelectronic devices. One of his patents details a cleaning composition that is substantially devoid of alkali hydroxides, alkaline earth metal hydroxides, and tetramethylammonium hydroxide. This composition effectively cleans post-CMP residue and contaminants without compromising the low-k dielectric material or the copper interconnect material. Another patent describes an amine-free composition that includes at least one oxidizing agent, one complexing agent, one basic compound, and water, achieving a pH range from about 2.5 to about 11.5. This innovative approach also ensures efficient cleaning while preserving the integrity of the microelectronic components.
Career Highlights
Laisheng Sun is currently employed at Entegris, Inc., where he applies his expertise in developing advanced cleaning solutions for the microelectronics industry. His work has been instrumental in improving the cleaning processes that are critical for the performance and reliability of microelectronic devices.
Collaborations
Laisheng has collaborated with notable colleagues, including Jun Liu and Jeffrey A. Barnes, contributing to the advancement of cleaning technologies in the microelectronics sector.
Conclusion
Laisheng Sun's innovative patents and contributions to the field of microelectronics highlight his role as a key inventor in developing effective cleaning solutions. His work continues to impact the industry positively, ensuring the reliability and performance of microelectronic devices.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile