Company Filing History:
Years Active: 2006
Title: Innovator L H Lee and His Contribution to Rapid Thermal Annealing
Introduction
L H Lee is a notable inventor based in Hsinchu, Taiwan, who has made significant strides in the field of semiconductor processing. With a focus on efficiency and precision, he has developed innovative techniques that are crucial for enhancing manufacturing processes in the tech industry.
Latest Patents
L H Lee holds a patent for a **Rapid Thermal Annealing Process**. This invention introduces a novel method and associated equipment that utilizes a pyrometer to measure operational parameters, such as the temperature during the rapid thermal annealing (RTA) process. The procedure involves two key steps: initially applying thermal treatment to a wafer, followed by a comparative analysis of the measured temperature against a predefined reference range. If the temperature is within the acceptable range, a second heating step is conducted; if not, the RTA equipment is deactivated to prevent damage, and the wafer is transitioned to an alternative RTA system to finalize the process.
Career Highlights
L H Lee is currently employed at Macronix International Co., Ltd., a reputable company known for its semiconductor solutions. His work at this organization underscores his commitment to pushing the boundaries of technology and innovation in semiconductor fabrication.
Collaborations
Throughout his career, L H Lee has collaborated with several talented colleagues, including Y Y Chang and Shih-Liang Chou. These partnerships reflect the collaborative spirit essential in research and development, fostering an environment where creative solutions can emerge to tackle complex challenges.
Conclusion
L H Lee's contributions through his patented rapid thermal annealing process exemplify the impact of innovative thinking in the semiconductor industry. His collaboration with skilled professionals at Macronix International Co., Ltd. further solidifies his role as a key player in advancing technology, paving the way for future innovations in this critical field.