This inventor holds 6 USPTO granted patents. Top assignees: Hughes Aircraft Company, Speedfam-Ipec Corporation. Active years: 1993-2002.
Company Filing History:
Years Active: 1993-2002
Title: L David Bollinger: Innovator in Semiconductor Technology
Introduction
L David Bollinger is a notable inventor based in Ridgefield, CT (US), recognized for his contributions to semiconductor technology. With a total of 6 patents to his name, Bollinger has made significant advancements in the field, particularly in improving the manufacturing processes of semiconductor wafers.
Latest Patents
Bollinger's latest patents include a system designed for improving the total thickness variation of a wafer. This innovative system utilizes an initial total thickness variation measuring instrument to create a dwell time versus position map. By employing a confined plasma, the system selectively removes material from the surface, resulting in an improved final total thickness variation across the bulk semiconductor wafer. Another notable patent involves methods and apparatus for the confinement of a plasma etch region. This reactor, which features a vacuum housing enclosing a plasma chamber, enables local plasma-assisted chemical etching on an etchable substrate. The chamber is movable and adjustable, allowing for precise control over the etching process.
Career Highlights
Throughout his career, Bollinger has worked with prominent companies such as Hughes Aircraft Company and Speedfam-Ipec Corporation. His experience in these organizations has contributed to his expertise in semiconductor technology and innovation.
Collaborations
Bollinger has collaborated with notable professionals in the field, including Charles B Zarowin and James F Nester. These collaborations have further enriched his work and contributions to semiconductor advancements.
Conclusion
L David Bollinger's innovative work in semiconductor technology has led to significant advancements in the industry. His patents reflect a commitment to improving manufacturing processes and enhancing the performance of semiconductor wafers.
