The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 1994
Filed:
Dec. 13, 1991
Applicant:
Inventors:
Charles B Zarowin, Rowayton, CT (US);
L David Bollinger, Ridgefield, CT (US);
Assignee:
Hughes Aircraft Company, Los Angeles, CA (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F / ;
U.S. Cl.
CPC ...
3644743 ; 156626 ; 156643 ;
Abstract
A method to determine the tool path of a material removal tool which is part of a system to shape the surface of a substrate is disclosed. The method conditions initial metrology data of the substrate into a dwell time versus position on the surface for the removal tool. The dwell time array is subsequently converted into a velocity versus position array so that a position controller means may be utilized to guide the movement of the substrate with respect to the removal tool to perform precise material removal on the surface of the substrate.